Aluminum Nitride Ceramic Heater

Parameter

Maximum operating temperature : 600°C

Maximum power density : 50 w/cm2

Voltage : 5-380V

Power : 100-3000 (w)

Thickness : 1.5-3mm

Material : Aluminum nitride

Maximum operating temperature : 500° C

Features : stable mechanical properties; Waterproof, oil, acid corrosion resistance, direct contact with heat; Good thermal efficiency, fast heating up; Good insulation, safety and environmental protection; Shapes and sizes can be customized

Typical applications : components for semiconductor manufacturing devices, electrostatic chucks, etc






Product Introduction


  • Large power density, rapid heating
  • The thermal efficiency can reach over 95%, and there is very little residual heat after power off.
  • Small size, compact structure, easy installation
  • The heating temperature field is controllable, which can be uniform temperature heating or non-uniform temperature heating. There is no heating blind zone, so that the heating is even and stable.
  • Long service life, safe and environmentally friendly, free of toxic components and heavy metal ions.
  • Strong resistance to chemical corrosion, and can be used in places with harsh environments such as humidity and corrosive gases.
  • It can be made into different shapes according to different thick film heater design requirements.

Material: Aluminum nitride ceramic Working temperature : 500℃
Features:waterproof; oil, acidcorrosionresistance; good thermal efficiency and rapid heating; good insulation; shape and size can be customized;
Typical applications : semiconductor manufacturing equipment, electrostatic chucks, etc.





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